Electrical breakdown strength enhancement in aluminum scandium nitride through a compositionally modulated periodic multilayer structure
نویسندگان
چکیده
In this study, we report the effects of a multilayer architecture on electrical breakdown strengths and ferroelectric characteristics 45 nm thick aluminum scandium nitride (AlScN) films. Multilayered films (three-layer, five-layer, seven-layer) are deposited via sequential deposition Al0.72Sc0.28N Al0.64Sc0.36N while maintaining constant volume ratios in all three samples. The effect increased number interfaces is compared to single layer Weibull analysis shows an increase characteristic field from 5.99 5.86 MV/cm for as high 7.20 seven-layered sample. coercive (EBD/Ec) also 1.37 1.26 up 1.44 sample with no significant change remanent polarization. enhancement can be understood propagation tree being deflected by and/or slowed relative compressive stress alternating layers.
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2021
ISSN: ['1089-7550', '0021-8979', '1520-8850']
DOI: https://doi.org/10.1063/5.0064041